Edwards

The ELRi series pumps are made for applications that are wet, humid and corrosive.

Edwards launches new variant to its XDS dry scroll pump range for more aggressive chemical applications.

Pump is suitable for a wide range of large-volume, high-flow applications, including semiconductor etch, solar PVD and coating PVD.

Fully-integrated controller eliminates connection cable and rack conventionally required with a non-integrated controller.

New pumps can safely handle flammable and corrosive gases.

Edwards has launched a new range of dry pumps that are designed to deliver high vacuum performance and enable full process integration. The compact GXS pump features screw technology...