Brooks Instrument has recently introduced a family of extremely high-performing direct liquid injection (DLI) vaporizer solutions. Designed for customers who require reliable liquid vaporization, the unique Brooks DLI vaporizers deliver chemically pure vapor in every application.
"Working with key customers in the semiconductor, solar, fuel cell, glass coating, R&D, and other markets, we’ve applied our application knowledge to develop the DLI vaporizer," stated Ed Fisher, Solutions Manager at Brooks Instrument. "Each DLI vaporizer is easily customizable for every customer’s unique application requirements and also overcomes the many operational limitations of conventional vaporizing technologies such as bubblers, or vapor draw systems, and flash vaporizers. Additionally, none of the conventional vaporizer technologies can eliminate the potential for liquid carry-over and its attendant problems like a DLI vaporizer."
A Brooks DLI vaporizer employs heated gas, rather than a hot metal surface, to accomplish liquid vaporization. As liquid enters the heated gas chamber, it is atomized by a carrier gas stream. Once the atomized liquid contacts the hot gas, it immediately changes to vapor. The result is chemically pure vapor, free of decomposition byproducts or liquid carry-over. Moreover, a Brooks DLI vaporizer can accept multiple liquid inlets and will generate perfectly mixed vapors. Brooks offers vaporizer designs to accommodate an extraordinarily wide range of liquid properties: extremely low vapor pressures (sub 1 torr), very low flow rates (sub 5 grams per hour), and very high flow rates (more than 15 kg/hr). Unlike bubblers and hot-surface vaporizers, Brooks DLI vaporizers are extremely efficient at producing vapor from liquid.
